Table of Contents
PPT Slide
Motivation and Goals
TCO Applications
Current Processing Techniques
PECVD Advantages
Current Experimental System
Preliminary Experiments
Preliminary Results
Results of DOE
Diagnostics
Optical Emission Spectroscopy
Transmission/Reflectometry
New Reactor Design
Summary
Goals for the year 2000
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Author: Colin A. Wolden
Email: cwolden@mines.edu
Home Page: http://www.mines.edu/Academic/chemeng/faculty/cwolden/index.html
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