PECVD of Transparent Conducting Oxides

The picture at right shows the reactor that we are using to deposit transparent conducting oxides (TCO) by plasma enhanced chemical vapor deposition (PECVD).  TCOs are semiconductor materials that possess the dual properties of being optically transparent and electrically conductive. There are broad applications for these films including transparent electrodes for light-emitting displays and photovoltaics devices. We are developing PECVD as a novel route to synthesize standard TCO films at reduced temperatures. Another aspect of the project involves creating new TCO materials. To make PECVD a robust manufacturing process we are employing in-situ optical diagnostics and real time control strategies.  This project is a collaboration with Professor Tyrone Vincent of CSM's Engineering Division. PhD candidate Josh Robbins leads the project  and is supported by a team of undergraduates including Cassie Fry, John Harvey, and Jackie Leaf.  

Primary Support for this project is being provided by the National Science Foundation's Division of Design, Manufacture, and Industrial Innovation through grant #9978676 and an associated REU supplements.