Low pressure chemical vapor deposition of novel TCOs

Transparent conducting oxides (TCOs) are semiconductor materials that possess the dual properties of being optically transparent and electrically conductive. In this collaborative project Teresa Barnes is developing a two-dimensional reactive flow model of a channel flow CVD reactor located at NREL. The model will be used to interpret previous experimental results and guide future process development for novel TCO synthesis.

This project is supported by the National Renewable Energy Laboratory