Interdisciplinary Silicon Processing Laboratory - Spring 2015
Your Instructor's history
Organization and Grading
Properties of a Good Lab Notebook
Materials from Lecture
Sample Module Reports and Guidelines
Clean room Procedures
Lab Equipment and Data Sheets (a summary of wet and dry oxide growth can be found here)
Run Sheets (Use to record important information from lab procedures)
Useful Links (links to the nanoHub applets have been added. Can be useful for simulations)
Partial support for this laboratory was provided by the National Science Foundation's Division of Undergraduate Education through grant number DUE-9851197. We also acknowledge equipment donations and support from the National Renewable Energy Laboratory and the Motorola Foundation, and support of the NSF sponsored Renewable Energy Materials Research Science and Engineering Center (REMRSEC).
This lab has been developed jointly by Professor Colin Wolden of the Chemical Engineering Department and Professor Reuben Collins of the Physics Department.
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