PHGN/CHEN435 and


Interdisciplinary Silicon Processing Laboratory - Spring 2017

Course Logistics
Your Instructor's history
Office Hours
Organization and Grading
Properties of a Good Lab Notebook
Materials from Lecture 
Sample Module Reports and Guidelines
Pre-lab Assignments
MOSFET Project

Laboratory Practices
Chemical Safety
Waste Disposal
Clean room Procedures

Laboratory Procedures
Lab Equipment and Data Sheets (a summary of wet and dry oxide growth can be found here)
Lab Procedures
Run Sheets (Use to record important information from lab procedures)
Useful Links (links to the nanoHub applets have been added.  Can be useful for simulations)

NSF Partial support for this laboratory was provided by the National Science Foundation's Division of Undergraduate Education through grant number DUE-9851197. We also acknowledge equipment donations and support from the National Renewable Energy Laboratory and the Motorola Foundation, and support of the NSF sponsored Renewable Energy Materials Research Science and Engineering Center (REMRSEC).

This lab has been developed jointly by Professor Colin Wolden  of the Chemical Engineering Department and Professor Reuben Collins of the Physics Department.

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This page last updated Jan. 6, 2017