Interdisciplinary Silicon Processing Laboratory - Spring 2008
Organization and Grading
Properties of a Good Lab Notebook
Materials from Lecture
Presentation Evaluation sheet
Clean room Procedures
Lab Equipment and Data Sheets (a summary of wet and dry oxide growth can be found here)
Partial support for this laboratory was provided by the National Science Foundation's Division of Undergraduate Education through grant number DUE-9851197. We also acknowledge equipment donations and support from the National Renewable Energy Laboratory and the Motorola Foundation.
This lab has been developed jointly by Professor Colin Wolden of the Chemical Engineering Department and Professor Reuben Collins of the Physics Department.
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