Dictionary - Best resource for definitions of acronyms, semiconductor terminology,
SUNY-Buffalo - Fantastic collection of applets that illustrate semiconductor device physics
Semiconductor Tutorials - Case Technology
IBM Research Journal - Technical papers on current processing issues
Bell Labs - State of the art semiconductor processing research projects
Lithography Overview - A summary and collection of papers from the Intel Site
Shipley Company - Lots of information on photoresists and future directions
Sematech - An international consortium, this is the site for future directions in the worldwide processing industry. Look especially at the roadmap.
Micron - Some elementary background on semiconductors and processing.