Motivation and Goals
- Transparent Conducting Oxides
- SnO2, In2O3, ZnO, CdO and alloys
- Transparent electrodes
- Display, photovoltaic applications
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- Plasma-enhanced CVD
- Low temperature synthesis for flexible substrates
- Lower cost/higher throughput
- Novel alloys
- Develop Robust Process
- Statistical design of experiments
- In-situ optical diagnostics
- Real time monitoring/control
- Develop process-property models