Diagnostics

• Optical Emission Spectroscopy (OES)
  • Plasma composition
  • In-situ, non-intrusive, semi-quantitative
  • Partial picture of chemistry

• Mass Spectroscopy
  • Effluent composition
  • Complete picture of gas composition
  • Complements OES

• Optical Reflectometry/Transmission
  • Measure the properties of the growing film
  • In-situ growth rate measurements
  • Correlated to other properties (conductivity)

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