Preliminary Results

• Growth Rates & Uniformity
  • High rates, > 400 Å/min
  • Good uniformity (~ 10%)

• Smooth, Transparent Films
  • 90% in visible
  • RMS Roughness = 2 nm (AFM)
    

• Conductive Films
  • Amorphous as deposited
  • r < 0.01 W-cm
  • No doping/annealing

Transmission

AFM Image

Previous slide

Next slide

Back to first slide

View graphic version