Preliminary Experiments
- Initial Experiments: Tin oxide
- Widely used: solar cells, sensors, protective coatings
- First hand experience with APCVD using O2, SnCl4
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- Inputs: Statistical Design of Experiments
- Total Flowrate (15 -75 sccm)
- Pressure (100 - 400 mTorr)
- Power (25 -150 W)
- Substrate Temperature (150 - 350 ºC)
- Composition (O2:SnCl4 Ratio)
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- Outputs
- Growth rate & uniformity: Spectral ellipsometry
- Transparency: UV-VIS-IR spectrophotometry
- Conductivity: 4 point probe
- Crystallinity: X-ray diffraction