New Reactor Design

• Optical Access to Substrate
  • Transmission spectra
  • Employs fiber optics
  • Axisymmetric, stagnation flow

rf

Heater

Substrate

Quartz

Walls

Showerhead

Mixing Plenum

Gas Inlet

Fiberoptic

to OES

Fiberoptic

to detector

Fiberoptic

to light source

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