Summary

• Demonstrated TCO PECVD
  • High deposition rates (> 400 Å/min)
  • Transparent, smooth films
  • Electrically conductive films
  • Statistical DOE identified strong coupling

• Optical Emission Spectroscopy
  • Preliminary OES performed
  • PCA underway to identify significant peaks

• Optical Transmission/Reflectrometry
  • Free carrier model developed to predict optical properties
  • Transmission identified for thickness, conductivity

• Reactor Modification Design
  • Optical access to substrate
  • Showerhead design for uniformity

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