Goals for the year 2000

• Build modified reactor
  • Allow more optical/feedthru access
  • Integrate Diagnostics: Transmission/OES
  • Improved geometry: Control ion energy, uniformity

• Experimental Process Characterization
  • Complete intrinsic tin oxide investigation
  • Investigate doping with SF6
  • Begin study of alternative TCO materials
  • Investigate post deposition treatment: anneal, UV
    

• Develop Models/Control Strategy
  • Process variables => Plasma environment
    (OES, dynamic models)
  • Plasma environment => Film properties (ex-situ, static)
  • Plasma environment => Film properties
    (transmission, dynamic models)

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