Current Experimental System

• 4” Parallel Plate Configuration

• 2” Glass Substrates

• 300 W rf power supply

• Match network

• Extensive gas handling

• Temp Control +/- 1 ºC

• Pressure control

• Control & data acquisition

through LabView

• Experimental Approach
  • Statistically designed experiments
  • In-situ diagnostics: OES and optical transmission
  • Ex-situ characterization: material properties
  • Develop static models: run to run, repeatability
  • Develop dynamic models: real-time process control

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